A monolithically integrated micro fluidic channel in a silicon-based photonic-integrated-circuit technology for biochemical sensing

Patrick Steglich; Martin Paul; Christian Mai; Andrea Böhme; Siegfried Bondarenko; Michael G. Weller; Andreas Mai

doi:10.1117/12.2588791

18 April 2021 A monolithically integrated micro fluidic channel in a silicon-based photonic-integrated-circuit technology for biochemical sensing

Patrick Steglich, Martin Paul, Christian Mai, Andrea Böhme, Siegfried Bondarenko, Michael G. Weller, Andreas Mai

Author Affiliations +

Proceedings Volume 11772, Optical Sensors 2021; 1177206 (2021) https://doi.org/10.1117/12.2588791
Event: SPIE Optics + Optoelectronics, 2021, Online Only

Abstract

In this work, a cost-effective optofluidic system is propossed and preliminary experimental results are presented. A microfluidic channel monolithically integrated into a photonic integrated circuit technology is used in conjunc- tion with a cyclo-olefin copolymer (COC) substrate to provide fluidic in- and output ports. We report on initial experimental results as well as on the simple and cost-effective fabrication of this optofluidic system by means of micro-milling.

Conference Presentation

Citation Download Citation

Patrick Steglich, Martin Paul, Christian Mai, Andrea Böhme, Siegfried Bondarenko, Michael G. Weller, and Andreas Mai "A monolithically integrated micro fluidic channel in a silicon-based photonic-integrated-circuit technology for biochemical sensing", Proc. SPIE 11772, Optical Sensors 2021, 1177206 (18 April 2021); https://doi.org/10.1117/12.2588791

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available