X-ray refractive glass microlenses produced by ion beam lithography

P. Medvedskaya; I. Lyatun; K. Golubenko; V. Yunkin; I. Snigireva; A. Snigirev

doi:10.1117/12.2589310

18 April 2021 X-ray refractive glass microlenses produced by ion beam lithography

P. Medvedskaya, I. Lyatun, K. Golubenko, V. Yunkin, I. Snigireva, A. Snigirev

Proceedings Volume 11776, EUV and X-ray Optics, Sources, and Instrumentation; 117760I (2021) https://doi.org/10.1117/12.2589310
Event: SPIE Optics + Optoelectronics, 2021, Online Only

Abstract

We demonstrate the capabilities of ion-beam lithography (IBL) for the manufacturing of X-ray micro-optics from amorphous materials. The feasibility of rapid and direct milling of microlenses in glass using a Ga+ ion beam is presented in this work. A single lens with curvature radii below 3 μm was produced from microstructure- and artifacts-free materials: borosilicate glass. In addition, the use of IBL to create optics with a complex curved surface with a radius of curvature of less than 3 μm from single crystal silicon has been shown. The new generation of micro-optics from new materials will be in demand for coherent applications at modern diffraction-limited light sources.

Citation Download Citation

P. Medvedskaya, I. Lyatun, K. Golubenko, V. Yunkin, I. Snigireva, and A. Snigirev "X-ray refractive glass microlenses produced by ion beam lithography", Proc. SPIE 11776, EUV and X-ray Optics, Sources, and Instrumentation, 117760I (18 April 2021); https://doi.org/10.1117/12.2589310

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