Formation Of Silicon-Based Heterostructures In Multichamber Integrated-Processing Thin-Film Deposition Systems

G. Lucovsky; S. S. Kim; D. V. Tsu; G. N. Parsons; J. T. Fitch

doi:10.1117/12.963948

15 February 1990 Formation Of Silicon-Based Heterostructures In Multichamber Integrated-Processing Thin-Film Deposition Systems

G. Lucovsky, S. S. Kim, D. V. Tsu, G. N. Parsons, J. T. Fitch

Author Affiliations +

Proceedings Volume 1188, Multichamber and In-Situ Processing of Electronic Materials; (1990) https://doi.org/10.1117/12.963948
Event: 1989 Microelectronic Integrated Processing Conferences, 1989, Santa Clara, United States

Abstract

This paper describes the formation of heterostructure devices using multichamber, integrated-processing thin-film deposition systems with UHV-compatible inter-chamber transfer. We describe the application of remote plasma-enhanced chemical-vapor deposition (Remote PECVD) for deposition of semiconducting and dielectric thin films in representative device structures. Special attention is directed to: i) deposition conditions necessary for control of thin-film and interface chemistry; and ii) post-deposition-annealing for the stabilization of physical and electronic properties of the heterostructures, including the interfaces between the constituent layers.

Citation Download Citation

G. Lucovsky, S. S. Kim, D. V. Tsu, G. N. Parsons, and J. T. Fitch "Formation Of Silicon-Based Heterostructures In Multichamber Integrated-Processing Thin-Film Deposition Systems", Proc. SPIE 1188, Multichamber and In-Situ Processing of Electronic Materials, (15 February 1990); https://doi.org/10.1117/12.963948

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available