Influence of roughness on scattering characteristics of periodic micro-nano optical structures

Lei Gong; Haibin Wang; Jie Yu; Zhiqiang Yang; Lihong Yang; Liguo Wang

doi:10.1117/12.2602172

19 October 2021 Influence of roughness on scattering characteristics of periodic micro-nano optical structures

Lei Gong, Haibin Wang, Jie Yu, Zhiqiang Yang, Lihong Yang, Liguo Wang

Proceedings Volume 11903, Nanophotonics and Micro/Nano Optics VII; 1190319 (2021) https://doi.org/10.1117/12.2602172
Event: SPIE/COS Photonics Asia, 2021, Nantong, JS, China

Abstract

During the preparation of optical films, each interface of the film system will deviate from the ideal shape of the smooth surface, and micro-roughness optical surface formed by random fluctuation of film thickness. With the rapid development of thin-film/semiconductor chip micro-nano periodic structures, periodic units and defect sizes are gradually approaching the nano-level, the influence of the roughness of the optical surface on the overall performance of the system cannot be ignored. Based on the three dimensional FDTD/MRTD algorithm, the system studies the light field distribution characteristics of the surface of complex optical structures at the micro-nano scale. Numerically analyze the optical field characteristics of the film surface with a multilayer periodic structure, and obtain the key parameters that affect the optical field of the film surface by analyzing the changes of the structure parameters. In view of the special structure of the multilayer periodic structure film, the concept of roughness is introduced to analyze the surface field changes on the surface of the multilayer film when the roughness exists, discuss the influence of the change of roughness parameters on the light field distribution, and give the influence law a detailed physical explanation.

Citation Download Citation

Lei Gong, Haibin Wang, Jie Yu, Zhiqiang Yang, Lihong Yang, and Liguo Wang "Influence of roughness on scattering characteristics of periodic micro-nano optical structures", Proc. SPIE 11903, Nanophotonics and Micro/Nano Optics VII, 1190319 (19 October 2021); https://doi.org/10.1117/12.2602172

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