3D nano-printing coupler for silicon nitride suspended waveguide

Mohit Khurana; Sina Baghbani Kordmahale; Connor Bowerman; Xiaohan Liu; Alexey V. Akimov

doi:10.1117/12.2608393

5 March 2022 3D nano-printing coupler for silicon nitride suspended waveguide

Mohit Khurana, Sina Baghbani Kordmahale, Connor Bowerman, Xiaohan Liu, Alexey V. Akimov

Proceedings Volume 12012, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XV; 1201209 (2022) https://doi.org/10.1117/12.2608393
Event: SPIE OPTO, 2022, San Francisco, California, United States

Conference Poster

Abstract

One of the challenges in integrated photonics is to build optical coupler for seamless coupling the light from fiber to nano-size waveguides or devices on semiconductor or photonics based chips. Here we present a design and technique based on polymer-made 3D structure of nano/mico size for suspended Silicon Nitride nanobeam, a 3D coupler which has in-port for single mode fiber. We show a scattering-free design of the optical interface with some compromises due to resolution limited 3D printer tool with the fiber plug into interface feature. Finite-difference time-domain (FDTD) simulations are performed to optimize the tapering regions. With this optimization upto 95% waveguide to coupler and 62% coupler to waveguide transmission is obtained for large bandwidth(∼ 100nm) at 600 nm. Conical-shaped single mode fiber is fabricated using wet etching technique and plugged into 3D coupler to obtain a compact fiber-to-chip optical device.

Citation Download Citation

Mohit Khurana, Sina Baghbani Kordmahale, Connor Bowerman, Xiaohan Liu, and Alexey V. Akimov "3D nano-printing coupler for silicon nitride suspended waveguide", Proc. SPIE 12012, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XV, 1201209 (5 March 2022); https://doi.org/10.1117/12.2608393

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