In-situ measurement technology of robotic polishing system

Wei Wang

doi:10.1117/12.2604749

13 December 2021 In-situ measurement technology of robotic polishing system

Wei Wang

Proceedings Volume 12071, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies; 1207111 (2021) https://doi.org/10.1117/12.2604749
Event: Tenth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2021), 2021, Chengdu, China

Abstract

With vigorous development of modern optical manufacturing in the direction of intelligence and precision, coupled with the continuous increase in the diameter of optical components and continuous improvement of precision requirements, industrial robot polishing technology has a wide range of application scenarios and broad development space in the field of optical manufacturing. The integration of processing and measurement is a key technology to improve the reliability and intelligence of precision manufacturing. Therefore, the research and development of in-situ measurement technology has become an important trend in the field of optical manufacturing. A measurement method based on deflectometry is a type of surface gradient measurement method that has been proposed and developed in recent years. Due to the advantages of superior simplicity, stability, and high dynamic range, it is promising for the in-situ measurement of optical surfaces. Based on monoscopic deflectometry, this paper develops an in-situ measurement device for industrial robot polishing system. The key problems of phase decoupling and optical path correction of transparent components are being researched, and high-precision double-surface measurement of transparent optical elements is realized, which is of great significance to the intelligent manufacturing of key optical elements.

Citation Download Citation

Wei Wang "In-situ measurement technology of robotic polishing system", Proc. SPIE 12071, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing and Metrology Technologies, 1207111 (13 December 2021); https://doi.org/10.1117/12.2604749

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available