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13 December 2021 Novel pressure sensors based on polymer film with surface microstructures
Man Zhang, Cheng Shan, Liangping Xia, Suihu Dang, Mengting Zeng, Chunlei Du
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Proceedings Volume 12075, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Intelligent Sensing Technologies and Applications; 120750O (2021) https://doi.org/10.1117/12.2605020
Event: Tenth International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2021), 2021, Chengdu, China
Abstract
This paper proposed a novel pressure sensors based on polymer film with surface microstructures. Polymer film with surface microstructures have displayed unique optoelectronic and electrical properties due to the triboelectric effect. The micro-deformation and moving of polymer microstructures can product electrostatic charge. The pressure sensors can convert external pressure or mechanical deformation into electrical signal. The pressure sensor consists of one polymer film with surface microstructures and one conductive electrode layer. The regular microstructures increase the film roughness and contact triboelectric area to enhance the electrostatic effect. To enhance the performance of the pressure sensor, high-precision microstructures on soft polymer sensitive layers are fabricated using UV nanoimprint lithography to generate more triboelectric charges. The pressure sensor is prepared, which consists of grating with 3 μm- period on the surface of the elastic layer and an indium tin oxide electrode thin film. By converting the friction mechanical energy into electrical power, a maximum power of 423.8 mW/m2 and the sensitivity of 0.7 V/kPa at a frequency of 5 Hz are obtained, which proves the excellent sensing performance of the sensor.
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Man Zhang, Cheng Shan, Liangping Xia, Suihu Dang, Mengting Zeng, and Chunlei Du "Novel pressure sensors based on polymer film with surface microstructures", Proc. SPIE 12075, 10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Intelligent Sensing Technologies and Applications, 120750O (13 December 2021); https://doi.org/10.1117/12.2605020
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KEYWORDS
Sensors
Polymers
Electrodes
Nanoimprint lithography
Polymer thin films
Optical lithography
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