Development of a sinusoidal pseudochirp material measure for the characterization of optical surface topography measuring instruments

Andre Felgner; Sai Gao; Dorothee Hueser; Uwe Brand

doi:10.1117/12.2621821

20 May 2022 Development of a sinusoidal pseudochirp material measure for the characterization of optical surface topography measuring instruments

Andre Felgner, Sai Gao, Dorothee Hueser, Uwe Brand

Author Affiliations +

Proceedings Volume 12137, Optics and Photonics for Advanced Dimensional Metrology II; 121370S (2022) https://doi.org/10.1117/12.2621821
Event: SPIE Photonics Europe, 2022, Strasbourg, France

Abstract

Optical surface topography measuring instruments are used more and more widely for surface quality control in industry by enabling fast, areal and non-destructive surface topography measurements. However, due to the complexity of the interaction between the surface properties to be measured and the measuring system, their capability to accurately reproduce topographical features of a surface under test is quite often questionable. To understand and investigate the topographic measurement accuracy of different optical surface topography measuring instruments, a physical measurement standard has been developed at PTB which is intended to be used to determine the metrological characteristics of surface topography measuring instruments such as topographic spatial resolution and topography fidelity. The physical standard, fabricated by a diamond turning process, containing nine sinusoidal structures with different amplitudes from 50 nm to 10 μm and varying spatial wavelengths from 2.6 μm to 82.8 μm, is suitable for the characterization of optical instruments with different magnification and numerical apertures. The design of the chirp structures, including the wavelength series, the smallest wavelength for different amplitudes, the slope distribution and the layout are detailed in this paper. The tool path for accurately positioning the cutting tool in fabrication is also described. First measurement results of the instruments response in terms of the features’ aspect ratio, slopes and curvatures, the homogeneity of the field of view of a confocal microscope are presented.

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Andre Felgner, Sai Gao, Dorothee Hueser, and Uwe Brand "Development of a sinusoidal pseudochirp material measure for the characterization of optical surface topography measuring instruments", Proc. SPIE 12137, Optics and Photonics for Advanced Dimensional Metrology II, 121370S (20 May 2022); https://doi.org/10.1117/12.2621821

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KEYWORDS

Microscopes

Confocal microscopy

Standards development

Objectives

Optical testing

Calibration

Optical microscopes

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