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3 October 2022 High accuracy dimensional microscopy through advanced modeling and machine learning
Phillip Manley, Ivan Sekulic
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Proceedings Volume 12216, Novel Optical Systems, Methods, and Applications XXV; 122160J (2022) https://doi.org/10.1117/12.2633288
Event: SPIE Optical Engineering + Applications, 2022, San Diego, California, United States
Abstract
In the SiM4diM project we improve the measurement uncertainty of bidirectional optical measurements in industrial inspection to below a tenth of a micrometer. This will be achieved by combining highly accurate focal and afocal measurements with a robust model of the measured intensity of the structure in question. The inverse problem is then efficiently solved by applying a machine learning algorithm in the form of Bayesian optimization. We present a practical guide to modelling an optical system as well as the latest results of the SiM4diM project, showcasing improved edge detection over the state of the art.
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Phillip Manley and Ivan Sekulic "High accuracy dimensional microscopy through advanced modeling and machine learning", Proc. SPIE 12216, Novel Optical Systems, Methods, and Applications XXV, 122160J (3 October 2022); https://doi.org/10.1117/12.2633288
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KEYWORDS
Machine learning
Microscopy
Modeling
Microscopes
Numerical analysis
Optical imaging
Optical testing
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