Glass-engraved metasurfaces: the path to ultra-low reflectance, extreme broadband performance, and high acceptance angle for high power laser applications

Nathan J. Ray; Jae-Hyuck Yoo; Hoang T. Nguyen; Michael A. Johnson; Eyal Feigenbaum

doi:10.1117/12.2641631

2 December 2022 Glass-engraved metasurfaces: the path to ultra-low reflectance, extreme broadband performance, and high acceptance angle for high power laser applications

Nathan J. Ray, Jae-Hyuck Yoo, Hoang T. Nguyen, Michael A. Johnson, Eyal Feigenbaum

Author Affiliations +

Proceedings Volume 12300, Laser-Induced Damage in Optical Materials 2022; 1230009 (2022) https://doi.org/10.1117/12.2641631
Event: SPIE Laser Damage, 2022, Rochester, New York, United States

Abstract

Recent work utilizing metal etching masks to fabricate substrate-engraved metasurfaces have been handicapped by the available etching depth, restricting the bandwidth of antireflective performance. Advances made to etch mask technology to facilitate deeper etching will be discussed here, and the taller ensuant metasurface features will be presented. The antireflective performance of these high aspect ratio structures (broad acceptance angles and broadband antireflective performance for both polarizations) will be discussed.

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Nathan J. Ray, Jae-Hyuck Yoo, Hoang T. Nguyen, Michael A. Johnson, and Eyal Feigenbaum "Glass-engraved metasurfaces: the path to ultra-low reflectance, extreme broadband performance, and high acceptance angle for high power laser applications", Proc. SPIE 12300, Laser-Induced Damage in Optical Materials 2022, 1230009 (2 December 2022); https://doi.org/10.1117/12.2641631

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