Geometric measurement error tests on full information of nanoscale surface with the use of scanning electron microscope

Sen Zhou; Lei Tao; Ying Li; Cong Yue

doi:10.1117/12.2645581

4 January 2023 Geometric measurement error tests on full information of nanoscale surface with the use of scanning electron microscope

Sen Zhou, Lei Tao, Ying Li, Cong Yue

Author Affiliations +

Proceedings Volume 12317, Optoelectronic Imaging and Multimedia Technology IX; 1231717 (2023) https://doi.org/10.1117/12.2645581
Event: SPIE/COS Photonics Asia, 2022, Online Only

Abstract

Scanning electron microscope (SEM) with feature analysis software has been used for micro-scale surface measurement tasks for many years because of the benefits of fast massive acquisition of nano-scale features, non-contact operation, and automatic data processing. Full information of surface usually needs to obtain in some inspection fields, such as vertical engine part monitoring, cleanliness analysis, melted bead and so on. According to the specific measured feature, the depth mode, resolution mode, and analysis mode of SEM should be firstly determined before use. Therefore, it is important to give user an easy operation mode to get deeper understanding on geometric features, thus offering a significantly enhanced user experience and higher measurement accuracy. Several common aspects of operated behavior should be tested that can cause them to yield larger measurement errors. In this paper, the experimental tests of full information acquisition of multi-scale pitches and step heights samples were respectively performed on a commercial SEM. The influence of the depth mode, resolution mode, and analysis mode of SEM were also discussed on edge features. Experimental results show that our works will be helpful of others who perform similar measurements.

Conference Presentation

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Sen Zhou, Lei Tao, Ying Li, and Cong Yue "Geometric measurement error tests on full information of nanoscale surface with the use of scanning electron microscope", Proc. SPIE 12317, Optoelectronic Imaging and Multimedia Technology IX, 1231717 (4 January 2023); https://doi.org/10.1117/12.2645581

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