Laser line interferometric sensor for multipoint velocity and distance measurements with camera based 3D calibrations

Hao Zhang

doi:10.1117/12.2641953

19 December 2022 Laser line interferometric sensor for multipoint velocity and distance measurements with camera based 3D calibrations

Hao Zhang

Author Affiliations +

Proceedings Volume 12319, Optical Metrology and Inspection for Industrial Applications IX; 123190K (2022) https://doi.org/10.1117/12.2641953
Event: SPIE/COS Photonics Asia, 2022, Online Only

Abstract

Optical, non-contact velocity and position measurement techniques offer great opportunities of in-process monitoring for instance in turning lathes and microfluidics. This work presents a novel laser line interferometric sensor, which enables simultaneous multipoint velocity and distance measurements. The sensor system is developed with cylindrical lens based measurement volume expansion and line camera based full field detection. Meanwhile, a matrix camera based calibration method is presented for an essential 3D evaluation of fringe spacings in the measurement volume. Experimental results show that the sensor allows synchronous multipoint velocity and distance measurements with a submicron distance uncertainty and a relative velocity uncertainty of 10⁻³ .

Conference Presentation

Citation Download Citation

Hao Zhang "Laser line interferometric sensor for multipoint velocity and distance measurements with camera based 3D calibrations", Proc. SPIE 12319, Optical Metrology and Inspection for Industrial Applications IX, 123190K (19 December 2022); https://doi.org/10.1117/12.2641953

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