Ge-profile design of SiGe base for high frequency performance of SiGe HPT

Xiaoting Shen; Hongyun Xie; Liang Chen; Dong Han; Xiaoxiong Yang; Wanrong Zhang

doi:10.1117/12.2644356

9 September 2022 Ge-profile design of SiGe base for high frequency performance of SiGe HPT

Xiaoting Shen, Hongyun Xie, Liang Chen, Dong Han, Xiaoxiong Yang, Wanrong Zhang

Proceedings Volume 12328, Second International Conference on Optics and Image Processing (ICOIP 2022); 123280L (2022) https://doi.org/10.1117/12.2644356
Event: Second International Conference on Optics and Image Processing (ICOIP 2022), 2022, Taian, China

Abstract

Current high speed photon communication system has a big demand for high performance optical detector, especially the high speed silicon-based detector. In this paper, a SiGe heterojunction phototransistor with different Ge-profile in the SiGe base is designed for high optical characteristic frequency. Influences of three types of Ge-distributions (box, triangular, and trapezoidal distribution) and different Ge-content which is in the range of 15%~35% on the frequency performance of SiGe heterojunction phototransistors (HPTs) are analyzed in this paper. A characteristic frequency of 10.52GHz for an 850 nm incident light is achieved by using triangular distribution with 20% Ge-content in the SiGe base.

Citation Download Citation

Xiaoting Shen, Hongyun Xie, Liang Chen, Dong Han, Xiaoxiong Yang, and Wanrong Zhang "Ge-profile design of SiGe base for high frequency performance of SiGe HPT", Proc. SPIE 12328, Second International Conference on Optics and Image Processing (ICOIP 2022), 123280L (9 September 2022); https://doi.org/10.1117/12.2644356

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