Paper
15 December 2022 High precision and fast measurement techniques of structural defects for large laser optics
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Proceedings Volume 12478, Thirteenth International Conference on Information Optics and Photonics (CIOP 2022); 124783Y (2022) https://doi.org/10.1117/12.2654888
Event: Thirteenth International Conference on Information Optics and Photonics (CIOP 2022), 2022, Xi'an, China
Abstract
Large optics are the key components of high power laser systems. The defects existing on the surface, under the surface and in the bulk are the main limitation to improve the output power of high power laser systems. The structural defects with micron or sub-millimeter size include surface scratches, digs, subsurface crack, bulk inclusions and bubbles, which are required to be removed during the manufacturing processes. The measurement precision and efficiency are the main challenges of developing novel measurement techniques due to their small size and random distribution on the surface with meter in length and within the materials with centimeters in depth. This paper presents our recent progress of measurement techniques based on laser scattering technique and microscopy for structural defects measurement of large optics. The laser scattering technique can quickly find the positions of these defects both on the surface and within the material. The microscopy is employed to precisely measure the size of the defects. The measurement strategy can not only improve the measurement efficiency but also obtain a considerable precision. Finally, the applications of these developed techniques for Nd-glass, laser crystals, optical coatings will also be presented, which has provided useful information both for manufacturing processes but also for laser systems design.
© (2022) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shijie Liu, Kaizao Ni, Shenghao Wang, Weiwei Wang, Weixiang Yang, Lanqing Li, Yun bo Bai, Rong Su, and Jianda Shao "High precision and fast measurement techniques of structural defects for large laser optics", Proc. SPIE 12478, Thirteenth International Conference on Information Optics and Photonics (CIOP 2022), 124783Y (15 December 2022); https://doi.org/10.1117/12.2654888
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KEYWORDS
Light scattering

Laser scattering

Optics manufacturing

Scattering

Glasses

Crystals

Optical components

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