Octuple-pass configuration for sensitivity improved reflectance confocal system

K. U. Hii; H. T. Su

doi:10.1117/12.3005553

20 September 2023 Octuple-pass configuration for sensitivity improved reflectance confocal system

K. U. Hii, H. T. Su

Proceedings Volume 12607, Optical Technology and Measurement for Industrial Applications Conference; 126070L (2023) https://doi.org/10.1117/12.3005553
Event: Optics and Photonics International Congress, 2023, Yokohama, Japan

Abstract

An octuple-pass configuration for reflectance confocal system is demonstrated. By utilizing the lens in quadrantal division as well as retro-reflection approach, the same propagating beam is configured to pass the lens eight times and directed to hit the same scanning point on the test surface as much as four times. With the increased number of passes, it is shown that the axial resolution of octuple-pass system is four times better than that of the conventional double-pass system. The effects of the beam size and its incident orientation on the lens are also investigated.

Citation Download Citation

K. U. Hii and H. T. Su "Octuple-pass configuration for sensitivity improved reflectance confocal system", Proc. SPIE 12607, Optical Technology and Measurement for Industrial Applications Conference, 126070L (20 September 2023); https://doi.org/10.1117/12.3005553

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