Figure of merit for comparison of misalignment test structures

Nikhil N. Kundu; Khalil I. Arshak; Bill Lane; J. Geaney; Shri N. Gupta

doi:10.1117/12.20031

1 June 1990 Figure of merit for comparison of misalignment test structures

Nikhil N. Kundu, Khalil I. Arshak, Bill Lane, J. Geaney, Shri N. Gupta

Proceedings Volume 1261, Integrated Circuit Metrology, Inspection, and Process Control IV; (1990) https://doi.org/10.1117/12.20031
Event: Microlithography '90, 1990, San Jose, CA, United States

Abstract

Many designs of misalignment test structures have been developed to evaluate registration error. It is desirable to compare the capabilities of these structures. However, a quantitative measure of comparison for such structures is not available. An attempt has been made in this paper to evaluate a quantitative comparison criterion. Technical merit of a test structure can be determined from the accuracy and precision of the measurement data. A Figure of Merit(FOM) is described here, for comparing the capabilities of two or more such test structures quantitatively.

Citation Download Citation

Nikhil N. Kundu, Khalil I. Arshak, Bill Lane, J. Geaney, and Shri N. Gupta "Figure of merit for comparison of misalignment test structures", Proc. SPIE 1261, Integrated Circuit Metrology, Inspection, and Process Control IV, (1 June 1990); https://doi.org/10.1117/12.20031

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