Advanced process library irradiation parameter modeling and analysis techniques

Fayin Shi; Liang Wang; Qianqian Sang; Mengdong Shen; Yong Li; Chang Liu

doi:10.1117/12.2685474

15 August 2023 Advanced process library irradiation parameter modeling and analysis techniques

Fayin Shi, Liang Wang, Qianqian Sang, Mengdong Shen, Yong Li, Chang Liu

Proceedings Volume 12719, Second International Conference on Electronic Information Technology (EIT 2023); 127193W (2023) https://doi.org/10.1117/12.2685474
Event: Second International Conference on Electronic Information Technology (EIT 2023), 2023, Wuhan, China

Abstract

The irradiation experimental analysis of chips can obtain irradiation data of advanced processes, which is beneficial to guide the research of new generation of anti-irradiation chips. In this paper, based on the GDS layout of the advanced process library, we firstly design the GDS layout hierarchy information extraction technology and implement the standard cell TCAD model automatic generation technology, then design the algorithm to generate irradiation parameters for heavy ion bombardment simulation experiments, and finally analyze the experimental data to establish the irradiation database. The experimental results show that it is feasible to establish an automatic irradiation data acquisition scheme based on the GDS layout of the advanced process library.

Citation Download Citation

Fayin Shi, Liang Wang, Qianqian Sang, Mengdong Shen, Yong Li, and Chang Liu "Advanced process library irradiation parameter modeling and analysis techniques", Proc. SPIE 12719, Second International Conference on Electronic Information Technology (EIT 2023), 127193W (15 August 2023); https://doi.org/10.1117/12.2685474

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