Simulation of a gas sensor on the integrated photonics silicon nitride platform

Yana V. Aleksakina; Aida G. Zakoyan; Vladislav V. Ivanov; Ruslan V. Kutluyarov; Grigory S. Voronkov

doi:10.1117/12.2681200

4 October 2023 Simulation of a gas sensor on the integrated photonics silicon nitride platform

Yana V. Aleksakina, Aida G. Zakoyan, Vladislav V. Ivanov, Ruslan V. Kutluyarov, Grigory S. Voronkov

Proceedings Volume 12743, Optical Technologies for Telecommunications 2022; 127430K (2023) https://doi.org/10.1117/12.2681200
Event: Optical Technologies for Telecommunications 2022, 2022, Ufa, Russian Federation

Abstract

The article describes an approach to simulating a microring resonator structure on the silicon nitride integrated photonics platform when exposed to various hazardous to human health gases. We simulated various gases by changing the refractive index of the medium surrounding the resonator from 1 (vacuum) to 1.001768 (CCl₄). The microring structure resonant wavelengths varied for various gases, and the quality factor, sensitivity, and intrinsic detection limit were determined. The simulation results show that it is possible to detect a wide range of gases hazardous to human health, including carbon tetrachloride, mercury vapor, carbon monoxide, and nitrogen monoxide, using the developed sensor. However, it is impossible to distinguish the last two gases based on the results of the current work using the SiN platform. Coatings are one of the potential ways to improve the designed sensor for detecting these gases.

Citation Download Citation

Yana V. Aleksakina, Aida G. Zakoyan, Vladislav V. Ivanov, Ruslan V. Kutluyarov, and Grigory S. Voronkov "Simulation of a gas sensor on the integrated photonics silicon nitride platform", Proc. SPIE 12743, Optical Technologies for Telecommunications 2022, 127430K (4 October 2023); https://doi.org/10.1117/12.2681200

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