PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
In this paper, we propose a novel portable confocal-controlled LIBS microscopy method with highly integrated structure. A 2D MEMS mirror scanning mirror was utilized to achieve beam transverse scanning and compact imaging structure design. Confocal-controlled LIBS was utilized to increase the focusing abilities and reduced the size of the laser ablation, thereby achieving a better spatial resolution imaging. Thereafter, 3D elemental mapping was constructed from the morphological and LIBS spectral data of the sample. The system had a lateral resolution of geometrical and elemental maps of up 800 nm and 15 μm, which is basically consistent with the theoretical analysis.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.