Guided filtering based surface recovery algorithm for white light interferometry

Long Ma; Xutao Yin; Fengyu Yang; Xin Pei; Kun Liang

doi:10.1117/12.2687591

27 November 2023 Guided filtering based surface recovery algorithm for white light interferometry

Long Ma, Xutao Yin, Fengyu Yang, Xin Pei, Kun Liang

Proceedings Volume 12769, Optical Metrology and Inspection for Industrial Applications X; 1276903 (2023) https://doi.org/10.1117/12.2687591
Event: SPIE/COS Photonics Asia, 2023, Beijing, China

Abstract

White Light Interferometry (WLI) is a widely used technique for surface recovery. However, it is extremely sensitive to various external disturbances, increasing the uncertainty on measurement results. In this paper, a time-domain guided filtering-based surface recovery algorithm is proposed for WLI. The reference signal is firstly simulated according to the spectral map of illuminator employed in the system. The correlation between the actual correlogram and the simulated one is then analyzed through the generalized cubic correlation delay estimation method. The corrected correlogram is obtained as a local linear transformation of the reference one that has been shifted, where the linear coefficients are estimated using least squares analysis. The surface height is then retrieved based on mapping relationship between the phase and frequency. The capability of the proposed method on noise suppression is investigated through simulation under different levels of additive noise. In the experiment, a step height standard (VLSI,181.0nm±2.1nm) is employed, which verifies the performance of the proposed method on measurement accuracy and reliability.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Long Ma, Xutao Yin, Fengyu Yang, Xin Pei, and Kun Liang "Guided filtering based surface recovery algorithm for white light interferometry", Proc. SPIE 12769, Optical Metrology and Inspection for Industrial Applications X, 1276903 (27 November 2023); https://doi.org/10.1117/12.2687591

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