Spectral analysis algorithm of vibration effect in phase-shifting interferometry

Wujun Lv; Ying Yang; Linghua Zhang; Yuhang Shen; Manlin Han; Jingming Guo; Chenxi Gong; Sen Han

doi:10.1117/12.2687344

27 November 2023 Spectral analysis algorithm of vibration effect in phase-shifting interferometry

Wujun Lv, Ying Yang, Linghua Zhang, Yuhang Shen, Manlin Han, Jingming Guo, Chenxi Gong, Sen Han

Proceedings Volume 12769, Optical Metrology and Inspection for Industrial Applications X; 127690P (2023) https://doi.org/10.1117/12.2687344
Event: SPIE/COS Photonics Asia, 2023, Beijing, China

Abstract

In the phase-shifting interferometry, the surface phase diagram is corrected by spectral analysis of the ‘intensity-phase pattern’ (the relationship between the interference intensity and the measured phase) of each phase-shifting image to achieve the purpose of reducing the vibration effect. This spectrum analysis algorithm is different from the previous methods. It does not determine the phase diagram, but corrects the phase diagram obtained by PSI measurement. It has few restrictions on the surface shape, and unlike the spatial Fourier method, it does not require high-density spatial carrier fringes, although at least a fringe of phase departure is recommended. The error between the influence of the simulated vibration signal on the phase and the influence of the actual measurement signal on the phase is less than 5 %.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Wujun Lv, Ying Yang, Linghua Zhang, Yuhang Shen, Manlin Han, Jingming Guo, Chenxi Gong, and Sen Han "Spectral analysis algorithm of vibration effect in phase-shifting interferometry", Proc. SPIE 12769, Optical Metrology and Inspection for Industrial Applications X, 127690P (27 November 2023); https://doi.org/10.1117/12.2687344

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