Multi-wavelength laser interferometer control system design

Chenxi Gong; Yuhang Shen; Sen Han; Jingming Guo; Ying Yang; Wujun Lv; Yuhang Li; Linghua Zhang; Manlin Han

doi:10.1117/12.2686984

27 November 2023 Multi-wavelength laser interferometer control system design

Chenxi Gong, Yuhang Shen, Sen Han, Jingming Guo, Ying Yang, Wujun Lv, Yuhang Li, Linghua Zhang, Manlin Han

Proceedings Volume 12769, Optical Metrology and Inspection for Industrial Applications X; 127691A (2023) https://doi.org/10.1117/12.2686984
Event: SPIE/COS Photonics Asia, 2023, Beijing, China

Conference Poster

Abstract

To address the problem that the traditional multi-wavelength wavefront detection requires manual adjustment of mechanical devices and low automation, this paper proposes a multi-wavelength laser interferometer control system with the Fizeau-type interferometer principle as the background, using Visual Studio to establish the upper computer control interface on the computer and sending signals to the microcontroller through the serial port to control the interferometer. Among them, the main controls are the switching of fluorescence alignment plate in 1064nm laser, the translation drive of collimating lens within 2mm of Z-axis, the automatic adjustment of variable diaphragm and the variable adjustment of CCD. The system realizes the automatic switching of five wavelengths of the multi-wavelength laser interferometer by controlling the precision motor, which reduces the error caused by manual adjustment and improves the measurement accuracy and efficiency of the interferometer.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Chenxi Gong, Yuhang Shen, Sen Han, Jingming Guo, Ying Yang, Wujun Lv, Yuhang Li, Linghua Zhang, and Manlin Han "Multi-wavelength laser interferometer control system design", Proc. SPIE 12769, Optical Metrology and Inspection for Industrial Applications X, 127691A (27 November 2023); https://doi.org/10.1117/12.2686984

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