Femtosecond laser-induced nano structures on 4H-SiC surface

Chung-Wei Cheng; Yi-Hsien Liu; Yi-En Li

doi:10.1117/12.2691251

12 March 2024 Femtosecond laser-induced nano structures on 4H-SiC surface

Chung-Wei Cheng, Yi-Hsien Liu, Yi-En Li

Proceedings Volume 12873, Laser-based Micro- and Nanoprocessing XVIII; 128730Z (2024) https://doi.org/10.1117/12.2691251
Event: SPIE LASE, 2024, San Francisco, California, United States

Conference Poster

Abstract

Femtosecond lasers can induce Laser-Induced Periodic Surface Structures (LIPSS) on the surfaces of diverse materials. However, the relatively high roughness of these structures is a major challenge. This research, centered on SiC materials and utilizing linear polarization, aimed to address this issue. The study successfully produced uniform structure and minimal roughness by controlling fluence and scanning speed. This structure was characterized by High-Quality Low Spatial Frequency LIPSS (HQ-LSFL).

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Chung-Wei Cheng, Yi-Hsien Liu, and Yi-En Li "Femtosecond laser-induced nano structures on 4H-SiC surface", Proc. SPIE 12873, Laser-based Micro- and Nanoprocessing XVIII, 128730Z (12 March 2024); https://doi.org/10.1117/12.2691251

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