Low-loss silicon nitride waveguides and high-Q microring resonators at 2-µm wavelength

Chunfan Zhu; Ruijun Wang; Qing Gao; Jincheng Wei; Siyuan Yu; Yanfeng Zhang

doi:10.1117/12.3007845

24 November 2023 Low-loss silicon nitride waveguides and high-Q microring resonators at 2-µm wavelength

Chunfan Zhu, Ruijun Wang, Qing Gao, Jincheng Wei, Siyuan Yu, Yanfeng Zhang

Proceedings Volume 12935, Fourteenth International Conference on Information Optics and Photonics (CIOP 2023); 129353Y (2023) https://doi.org/10.1117/12.3007845
Event: Fourteenth International Conference on Information Optics and Photonics (CIOP 2023), 2023, Xi’an, China

Abstract

2-μm-wavelength-range spectroscopy and telecommunication applications could greatly benefit from the well-developed and highly scalable silicon photonics technology. However, the performance of silicon photonic components operating in this spectral range is still limited by the relatively large waveguide propagation loss. To address this pressing issue, we present an effective solution by harnessing the capabilities of the silicon nitride waveguide platform with its remarkable broadband transparency. In this work, we have successfully designed and demonstrated low-loss silicon nitride waveguides operating at the 2-μm wavelength, exhibiting an impressively low propagation loss of 1.07±0.04 dB/cm. Additionally, we have achieved the successful realization of high-Q microring resonator, exhibiting a record-high Q-factor of ~4.9×10⁵ at the 2-μm wavelength.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Chunfan Zhu, Ruijun Wang, Qing Gao, Jincheng Wei, Siyuan Yu, and Yanfeng Zhang "Low-loss silicon nitride waveguides and high-Q microring resonators at 2-µm wavelength", Proc. SPIE 12935, Fourteenth International Conference on Information Optics and Photonics (CIOP 2023), 129353Y (24 November 2023); https://doi.org/10.1117/12.3007845

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KEYWORDS

Waveguides

Silicon nitride

Microresonators

Microrings

Resonators

Silicon photonics

Scanning electron microscopy

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