Avoiding-mode-crossing-free micro-resonators on a wafer-scale ion-sliced 4H-silicon-carbide-on-insulator platform

Liping Zhou; Ailun Yi; Chengli Wang; Bingcheng Yang; Jiaxiang Zhang; Xin Ou

doi:10.1117/12.3022389

18 March 2024 Avoiding-mode-crossing-free micro-resonators on a wafer-scale ion-sliced 4H-silicon-carbide-on-insulator platform

Liping Zhou, Ailun Yi, Chengli Wang, Bingcheng Yang, Jiaxiang Zhang, Xin Ou

Author Affiliations +

Proceedings Volume 13104, Advanced Fiber Laser Conference (AFL2023); 131041K (2024) https://doi.org/10.1117/12.3022389
Event: Advanced Fiber Laser Conference (AFL2023), 2023, Shenzhen, China

Abstract

4H-silicon carbide-on-insulator (4H-SiCOI) has emerged as a contender for integrated photonics owing to its properties such as CMOS compatibility, high second-and-third-order nonlinearities. So far, various micro-resonators have been realized on the 4H-SiCOI platform, enabling numerous nonlinear optical applications. However, micro-resonators for nonlinear optics featuring wide waveguides inherently suffer from avoid mode crossing (AMX) effect. Here, we introduce Euler bends to build micro-resonators on a 4H-SiCOI wafer prepared by the ion-cutting technique. The fabricated micro-resonators show high-Q values above 1×10⁵ and the AMX effect is remarkably suppressed. The avoid-mode-crossing-free micro-resonators reported on the CMOS-compatible wafer-scale 4H-SiCOI platform would constitute an important ingredient for the envisaged large-scale integrated nonlinear photonic circuits.

(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.

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Liping Zhou, Ailun Yi, Chengli Wang, Bingcheng Yang, Jiaxiang Zhang, and Xin Ou "Avoiding-mode-crossing-free micro-resonators on a wafer-scale ion-sliced 4H-silicon-carbide-on-insulator platform", Proc. SPIE 13104, Advanced Fiber Laser Conference (AFL2023), 131041K (18 March 2024); https://doi.org/10.1117/12.3022389

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KEYWORDS

Microresonators

Resonators

Waveguides

Dispersion

Fabrication

Silicon carbide

Photonic integrated circuits

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