Ballistic simulation of optical coatings deposited over topography

R. N. Tait; S. K. Dew; Tom J. Smy; Michael J. Brett

doi:10.1117/12.22422

1 December 1990 Ballistic simulation of optical coatings deposited over topography

R. N. Tait, S. K. Dew, Tom J. Smy, Michael J. Brett

Proceedings Volume 1324, Modeling of Optical Thin Films II; (1990) https://doi.org/10.1117/12.22422
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

The use of SIMBAD, a two dimensional ballistic deposition simulation of the growth of thin films, is suggested for investigation of refractive index inhomogeneities in integrated optics devices. Refractive index variation as a function of packing fraction is obtained experimentally for evaporated MgF and sputtered SiO2 by depositing films at angles. These relationships are used to translate SIMBAD density predictions to refractive index predictions for films deposited on integrated optics topographies.

Citation Download Citation

R. N. Tait, S. K. Dew, Tom J. Smy, and Michael J. Brett "Ballistic simulation of optical coatings deposited over topography", Proc. SPIE 1324, Modeling of Optical Thin Films II, (1 December 1990); https://doi.org/10.1117/12.22422

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