Ion-beam cleaning of contaminated optics

Robert F. Fisher; Patricia M. Beauchamp; Steven M. Flammang; Timothy L. Howard

doi:10.1117/12.22596

1 November 1990 Ion-beam cleaning of contaminated optics

Robert F. Fisher, Patricia M. Beauchamp, Steven M. Flammang, Timothy L. Howard

Proceedings Volume 1329, Optical System Contamination: Effects, Measurement, Control II; (1990) https://doi.org/10.1117/12.22596
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

Recent results on ion beam cleaning experiments of super-polished cryogenic mirrors are presented. A variety of contaminants such as air, water, ammonia, and hexane have been studied and some of the experimental parameters necessary to remove these were determined. The mirrors were exposed to a controlled amount of a known contaminant and/or mixtures of known contaminants. Dual-wavelength (0.633- and 10.6-micron) bidirectional reflectance distribution function measurements were made on the clean, contaminated and ion beam cleaned surfaces. These data, along with quartz crystal microbalance measurements and mass spectroscopic data, are used to compare the effect of contaminants and ion beam removal of these contaminants on the scatter properties of various mirror surfaces.

Citation Download Citation

Robert F. Fisher, Patricia M. Beauchamp, Steven M. Flammang, and Timothy L. Howard "Ion-beam cleaning of contaminated optics", Proc. SPIE 1329, Optical System Contamination: Effects, Measurement, Control II, (1 November 1990); https://doi.org/10.1117/12.22596

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