Correlation of BRDF and profilometry for sub-Angstrom surfaces

Lane A. Darnton; Steven G. Silott; Duane A. Willis

doi:10.1117/12.22667

1 December 1990 Correlation of BRDF and profilometry for sub-Angstrom surfaces

Lane A. Darnton, Steven G. Silott, Duane A. Willis

Proceedings Volume 1331, Stray Radiation in Optical Systems; (1990) https://doi.org/10.1117/12.22667
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

Recent improvements in optical polishing techniques have made possible optical surfaces exhibiting random microroughness levels of less than one Angstrom rms. One such mirror, recently produced by the Photronics Corporation and tested at TRW, exhibited a measured microroughness of 0.22 A rms but had scatter behavior which was not commensurate with this value. The problem was discovered to be point defects in the surface which were not detected during profilometry, and which would not have been problematic in mirrors having microroughnesses of a few A rms. It is concluded that visual scatter inspection, at a minimum, should be used as an in-process polishing diagnostic, in addition to profilometry.

Citation Download Citation

Lane A. Darnton, Steven G. Silott, and Duane A. Willis "Correlation of BRDF and profilometry for sub-Angstrom surfaces", Proc. SPIE 1331, Stray Radiation in Optical Systems, (1 December 1990); https://doi.org/10.1117/12.22667

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