Absolute measurement of spherical surfaces

Katherine Creath; James C. Wyant

doi:10.1117/12.51045

1 January 1991 Absolute measurement of spherical surfaces

Katherine Creath, James C. Wyant

Proceedings Volume 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection; (1991) https://doi.org/10.1117/12.51045
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

The testing of spherical surfaces using the three-measurement technique outlined by Jensen requires very precise alignment of the sphere relative to the interferometer. An easier technique for the absolute measurement of spherical surfaces has been developed which does not require the precise alignment of the Jensen technique and uses only two measurements. As long as the test surface does not contain any aberrations with odd symmetry, these aberrations can be subtracted from the measurement and an absolute measurement of the test surface can be obtained. This paper describes and compares these two techniques and shows results of testing a A112 P-V (jeak-to-valley) sphere (N.A.=0.4) using both techniques with a phase-measuring Fizeau interferometer. These measurement techniques are repeatable to waves PV.

Citation Download Citation

Katherine Creath and James C. Wyant "Absolute measurement of spherical surfaces", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); https://doi.org/10.1117/12.51045

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