Holographic measurement of the angular error of a table moving along a slideway

Kiyofumi Matsuda; Koji Tenjimbayashi

doi:10.1117/12.51073

1 January 1991 Holographic measurement of the angular error of a table moving along a slideway

Kiyofumi Matsuda, Koji Tenjimbayashi

Proceedings Volume 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection; (1991) https://doi.org/10.1117/12.51073
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

An optical method for the precise measurement of the angular errors of a table moving along a slideway is described. The system is arranged so that angular errors of the table give rise to sideways shifts of a random wavefront generated by a ground glass screen. The shifted wavefront is made to interfere with a reconstruction of the original unshifted wavefront produced by a hologram, and the angular errors determined from the interference fringes which appear. This technique has several advantages over usual autocollimator methods.

Citation Download Citation

Kiyofumi Matsuda and Koji Tenjimbayashi "Holographic measurement of the angular error of a table moving along a slideway", Proc. SPIE 1332, Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection, (1 January 1991); https://doi.org/10.1117/12.51073

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