Plane and concave VUV and soft x-ray multilayered mirrors

Jianlin Cao; Tongqun Miao; Longsheng Qian; Xioufang Zhu; Futian Li; Yueying Ma; Limin Qian; Bo Chen; Xingdan Chen

doi:10.1117/12.23316

1 January 1991 Plane and concave VUV and soft x-ray multilayered mirrors

Jianlin Cao, Tongqun Miao, Longsheng Qian, Xioufang Zhu, Futian Li, Yueying Ma, Limin Qian, Bo Chen, Xingdan Chen

Proceedings Volume 1345, Advanced X-Ray/EUV Radiation Sources and Applications; (1991) https://doi.org/10.1117/12.23316
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

The current works and efforts of the authors for making muLtiLayered ptane and concave mirrors in VUV and soft x-ray region are described. These incLude the principLe of seLecting coating materiaLs and optimum design the fabrication of substrates the deposition using eectron beam evaporation the test and evatuation of performance and the preparation of faciLities. 1 .

Citation Download Citation

Jianlin Cao, Tongqun Miao, Longsheng Qian, Xioufang Zhu, Futian Li, Yueying Ma, Limin Qian, Bo Chen, and Xingdan Chen "Plane and concave VUV and soft x-ray multilayered mirrors", Proc. SPIE 1345, Advanced X-Ray/EUV Radiation Sources and Applications, (1 January 1991); https://doi.org/10.1117/12.23316

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