VUV wall stabilized argon arc discharge source

Futian Li; Jianlin Cao; Bo Chen; Limin Qian; Lei Jin; Xingdan Chen

doi:10.1117/12.23304

1 January 1991 VUV wall stabilized argon arc discharge source

Futian Li, Jianlin Cao, Bo Chen, Limin Qian, Lei Jin, Xingdan Chen

Proceedings Volume 1345, Advanced X-Ray/EUV Radiation Sources and Applications; (1991) https://doi.org/10.1117/12.23304
Event: 34th Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1990, San Diego, CA, United States

Abstract

10 kW and 2kw wall stabilized argon arc sources have been developed in this institute as VUV spectroradiometric standard sources. The stability and reproducibility are better than 0. 2. Plasma spectroscopic diagnostics shows that the plasma temperature is 12759 K and the electron density is 1. 36x1023 m3 when the arc current is 40 A and argon pressure is 1. 75x10S'' Pa. Richter method absolute method relative method and computer spectral line reconstruction technique were used for plasma diagnostics. Based on McPherson 2253 M5 normal incidence VUV monochromator a computer controlled VUV spectroradiometer was set up. Impurity gases such as N1COKr Owere put into 10 kW arc and several black body limited lines (BBLL) were produced from 100 to 250 nm. These lines were used to calibrate deuterium lamp as transfer standard. 1.

Citation Download Citation

Futian Li, Jianlin Cao, Bo Chen, Limin Qian, Lei Jin, and Xingdan Chen "VUV wall stabilized argon arc discharge source", Proc. SPIE 1345, Advanced X-Ray/EUV Radiation Sources and Applications, (1 January 1991); https://doi.org/10.1117/12.23304

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available