Paper
1 October 1990 CW-laser-induced chemical vapor deposition of W
Guiqiang Q. Zhang, Dieter Baeuerle
Author Affiliations +
Proceedings Volume 1352, 1st Intl School on Laser Surface Microprocessing; (1990) https://doi.org/10.1117/12.23723
Event: International School on Laser Surface Microprocessing, 1989, Tashkent, Uzbekistan
Abstract
Abstract not available.
© (1990) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Guiqiang Q. Zhang and Dieter Baeuerle "CW-laser-induced chemical vapor deposition of W", Proc. SPIE 1352, 1st Intl School on Laser Surface Microprocessing, (1 October 1990); https://doi.org/10.1117/12.23723
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KEYWORDS
Chemical vapor deposition

Chemical lasers

Hydrogen

Krypton

Laser development

Laser processing

Silicon

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