Defect reduction strategies for submicron manufacturing: tools and methodologies

Robyn Sue Coleman; Prasanna R. Chitturi

doi:10.1117/12.48956

1 March 1991 Defect reduction strategies for submicron manufacturing: tools and methodologies

Robyn Sue Coleman, Prasanna R. Chitturi

Proceedings Volume 1392, Advanced Techniques for Integrated Circuit Processing; (1991) https://doi.org/10.1117/12.48956
Event: Processing Integration, 1990, Santa Clara, CA, United States

Abstract

Reducing and controlling defect densities is critical to the successful manufacture of semiconductor devices. Automated wafer inspection tools detecting smaller defects and providing more consistent results L2than previous techniques are being used more and more in this effort. In order to use these tools effectively a structured approach must be taken. In addition understanding the performance ofthe automated inspection tool is key to correctly interpreting the information it provides. This paper will describe a defect reduction methodology employing an automated wafer inspection tool which has been successfully applied by several semiconductor manufacturers. The critical aspects of applying such a program are discussed in a case study format. The second portion of this paper presents possible barriers to a succesful defect reduction program. The organizational elements of a successful program are discussed. A methodology for evaluating the performance of an automated wafer inspection tool is outlined. The design of a test vehicle useful for tool characterization is described. Parameters which have been shown to have significant impact on the performance of wafer inspection tools are identified. Data illustrating the methodology is presented.

Citation Download Citation

Robyn Sue Coleman and Prasanna R. Chitturi "Defect reduction strategies for submicron manufacturing: tools and methodologies", Proc. SPIE 1392, Advanced Techniques for Integrated Circuit Processing, (1 March 1991); https://doi.org/10.1117/12.48956

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available