Infrared microanalysis of contaminants at grazing incidence

John A. Reffner

doi:10.1117/12.45135

1 April 1991 Infrared microanalysis of contaminants at grazing incidence

John A. Reffner

Proceedings Volume 1437, Applied Spectroscopy in Material Science; (1991) https://doi.org/10.1117/12.45135
Event: Optics, Electro-Optics, and Laser Applications in Science and Engineering, 1991, Los Angeles, CA, United States

Abstract

A new objective lens for grazing angle FT-IR microscopy provides a means for the infrared analysis of monomolecular films in small (25 X 25 micrometers ) areas. Conventional grazing incidence reflection spectroscopy is an established technology for detecting and analyzing thin surface films on metals or highly reflecting materials. The grazing incidence objective extends these techniques to microscopic areas. Applications of grazing angle FT-IR microscopy (GAM) are illustrated by exemplar analyses. The analyses of thin film lubricants and contaminants are specially important.

Citation Download Citation

John A. Reffner "Infrared microanalysis of contaminants at grazing incidence", Proc. SPIE 1437, Applied Spectroscopy in Material Science, (1 April 1991); https://doi.org/10.1117/12.45135

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