Excimer laser optics

Nikolay V. Morozov; Spartak I. Sagitov; P. B. Sergeyev

doi:10.1117/12.27568

1 June 1991 Excimer laser optics

Nikolay V. Morozov, Spartak I. Sagitov, P. B. Sergeyev

Proceedings Volume 1441, Laser-Induced Damage in Optical Materials: 1990; (1991) https://doi.org/10.1117/12.27568
Event: Laser-Induced Damage in Optical Materials: 1990, 1990, Boulder, CO, United States

Abstract

For optical materials mirrors and antirerleotion coatings the laser damage resistance resul ts for XeCl Kr ArP eximer laser wavelengths are presented.

Citation Download Citation

Nikolay V. Morozov, Spartak I. Sagitov, and P. B. Sergeyev "Excimer laser optics", Proc. SPIE 1441, Laser-Induced Damage in Optical Materials: 1990, (1 June 1991); https://doi.org/10.1117/12.27568

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