Disk-shaped VUV+O source used as resist asher and resist developer

Shuzo Hattori; George J. Collins; Zenqi Yu; Dai Sugimoto; Masahiro Saita

doi:10.1117/12.44814

1 July 1991 Disk-shaped VUV+O source used as resist asher and resist developer

Shuzo Hattori, George J. Collins, Zenqi Yu, Dai Sugimoto, Masahiro Saita

Proceedings Volume 1463, Optical/Laser Microlithography IV; (1991) https://doi.org/10.1117/12.44814
Event: Microlithography, 1991, San Jose, CA, United States

Abstract

An 8 cm diameter disk-shaped oxygen plasma is used as a resist asher and resist developer located in a plasma-free region. The resist surface is exposed to both 130.6 nm flux (10-2W cm-2 Sr-1 oxygen resonance line) as well as an atomic oxygen flux (1015 atoms cm-2 sec-1). A high ashing rate of 1.5 micrometers /min is obtained at 100 degree(s)C, with a rather low apparent excitation energy of 1.07 kcal per mol. In contrast, by introducing 8 atomic % silicon into plasma polymerized styrene, the authors observed an unmeasurable etch rate after a brief induction time to form a Si-O-C containing a protective layer with a thickness loss of 0.2 micrometers . These results show a potential ability of the plasma apparatus used as a low-temperature defect-free resist ashing and dry development silylated resist.

Citation Download Citation

Shuzo Hattori, George J. Collins, Zenqi Yu, Dai Sugimoto, and Masahiro Saita "Disk-shaped VUV+O source used as resist asher and resist developer", Proc. SPIE 1463, Optical/Laser Microlithography IV, (1 July 1991); https://doi.org/10.1117/12.44814

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available