Laser alignment modeling using rigorous numerical simulations

Gregory L. Wojcik; David K. Vaughan; John Mould Jr.; Francisco A. Leon; Qi-De Qian; Michael A. Lutz

doi:10.1117/12.44789

1 July 1991 Laser alignment modeling using rigorous numerical simulations

Gregory L. Wojcik, David K. Vaughan, John Mould Jr., Francisco A. Leon, Qi-De Qian, Michael A. Lutz

Proceedings Volume 1463, Optical/Laser Microlithography IV; (1991) https://doi.org/10.1117/12.44789
Event: Microlithography, 1991, San Jose, CA, United States

Abstract

This paper describes a three-dimensional computer modeling technique for alignment system simulation, and some example calculations. The technique has been developed to address issues of alignment and overlay accuracy for future generation VLSI technology. The analytical basis is a general finite element electromagnetic wave propagation code, EMFlex, that rigorously simulates light scattering from the 3-D alignment mark. Using the Nikon Laser Step Alignment (LSA) system as a model instrument, the overlay error and signal shape are simulated. Examples of an idealized asymmetric metal mark are studied. Preliminary results suggest that the rigorous simulations are substantially different from the one-dimensional Fresnel approximations that have been used previously.

Citation Download Citation

Gregory L. Wojcik, David K. Vaughan, John Mould Jr., Francisco A. Leon, Qi-De Qian, and Michael A. Lutz "Laser alignment modeling using rigorous numerical simulations", Proc. SPIE 1463, Optical/Laser Microlithography IV, (1 July 1991); https://doi.org/10.1117/12.44789

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available