Amorphous silicon thin film x-ray sensor

Guang-Pu Wei

doi:10.1117/12.47313

1 November 1991 Amorphous silicon thin film x-ray sensor

Guang-Pu Wei

Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47313
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China

Abstract

Three kinds of amorphous silicon x-ray sensors have been developed. The structures together with some basic characteristics of these sensors are reported. As an example of application, some operational tests for x-ray computed tomography (XCT) have been carried out. The results show that these sensors may provide a variety of potential applications in medical, scientific, and industrial fields.

Citation Download Citation

Guang-Pu Wei "Amorphous silicon thin film x-ray sensor", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47313

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