Multicomponent electric-arc source of metallic plasma

Dmitriy A. Karpov; S. N. Nazikov

doi:10.1117/12.47293

1 November 1991 Multicomponent electric-arc source of metallic plasma

Dmitriy A. Karpov, S. N. Nazikov

Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47293
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China

Abstract

Results of studies carried out during development of a metallic plasma multicomponent electric-arc source and containing eight independently operating cathodes are described. Structural scheme of the developed device and technical characteristics are represented.

Citation Download Citation

Dmitriy A. Karpov and S. N. Nazikov "Multicomponent electric-arc source of metallic plasma", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47293

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