Properties and applications of ferroelectric and piezoelectric thin films

Tadashi Shiosaki

doi:10.1117/12.47310

1 November 1991 Properties and applications of ferroelectric and piezoelectric thin films

Tadashi Shiosaki

Proceedings Volume 1519, International Conference on Thin Film Physics and Applications; (1991) https://doi.org/10.1117/12.47310
Event: International Conference on Thin Film Physics and Applications, 1991, Shanghai, China

Abstract

Polar axis oriented films are important in piezoelectric, pyroelectric, optic, and ferroelectric applications. The applications of polar axis oriented films are reviewed. An acousto-optic deflector made of ZnO thin film optics and Si Schottky diode photo-detectors integrated on a Si substrate is described. The properties mainly related to the integrated memory applications of polar axis oriented ferroelectric films grown by reactive magnetron sputtering are reported.

Citation Download Citation

Tadashi Shiosaki "Properties and applications of ferroelectric and piezoelectric thin films", Proc. SPIE 1519, International Conference on Thin Film Physics and Applications, (1 November 1991); https://doi.org/10.1117/12.47310

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