Description and calibration of a fully automated infrared scatterometer

Stephane Mainguy; Michel Olivier; Michel A. Josse; Michel Guidon

doi:10.1117/12.50517

1 December 1991 Description and calibration of a fully automated infrared scatterometer

Stephane Mainguy, Michel Olivier, Michel A. Josse, Michel Guidon

Proceedings Volume 1530, Optical Scatter: Applications, Measurement, and Theory; (1991) https://doi.org/10.1117/12.50517
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

A fully automated scatterometer, designed for BRDF measurements in the IR at about 10 micrometers , is described. Basically, it works around a reflecting parabola (464 mm diameter, F/0.25) and permits measurements in and out of the plane of incidence. Optical properties of the parabolic mirror are emphasized by a ray-tracing technique which permits determination of the correct illumination on the sample and detection conditions of scattered light. Advantages and drawbacks of such an instrument are discussed, as well as calibration procedures. As a conclusion, we present experimental results to illustrate the instrument capabilities.

Citation Download Citation

Stephane Mainguy, Michel Olivier, Michel A. Josse, and Michel Guidon "Description and calibration of a fully automated infrared scatterometer", Proc. SPIE 1530, Optical Scatter: Applications, Measurement, and Theory, (1 December 1991); https://doi.org/10.1117/12.50517

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