Birefringent common-path interferometer for testing large convex spherical surfaces

Xu Xiang Yang; Caixin Xiang

doi:10.1117/12.134870

1 January 1992 Birefringent common-path interferometer for testing large convex spherical surfaces

Xu Xiang Yang, Caixin Xiang

Proceedings Volume 1531, Advanced Optical Manufacturing and Testing II; (1992) https://doi.org/10.1117/12.134870
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

We have developed a new birefringent common-path interferometric method incorporating an automatic data processing system for testing large convex spherical surfaces. This interferometer can eliminate system errors and achieve accurate results of measurement. Precision is about (lambda) /50 and accuracy is about (lambda) /10.

Citation Download Citation

Xu Xiang Yang and Caixin Xiang "Birefringent common-path interferometer for testing large convex spherical surfaces", Proc. SPIE 1531, Advanced Optical Manufacturing and Testing II, (1 January 1992); https://doi.org/10.1117/12.134870

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