Microdisplacement positioning system for a diffraction grating ruling engine

Hou-Min Yang; Xiaolin Wang; Yinxian Zhang

doi:10.1117/12.48854

1 December 1991 Microdisplacement positioning system for a diffraction grating ruling engine

Hou-Min Yang, Xiaolin Wang, Yinxian Zhang

Proceedings Volume 1533, Optomechanics and Dimensional Stability; (1991) https://doi.org/10.1117/12.48854
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

This paper presents a new high-accuracy micro-displacement positioning system controlled by a diffraction grating interferometer. The principle and technique are given, based on which micro-displacements are measured by an interfering system consisting of a spectral grating. In order that the interferometer is stable and reliable for several days and nights, the interfering signals are program-controlled. The movement of the diamond is even and smooth due to locked phase of the bridge generator with frequency division of crystal oscillation. The locked phase of the interfering signals with the bridge is controlled by Bang-Bang and PID modes. The movement accuracy of the engine is measured and analyzed by interpolation. The division error: (sigma) <3.1 nm. The grating quality can be determined from the spectral contour obtained by Fourier transform. As a result, it is corresponding with that obtained by spectral means.

Citation Download Citation

Hou-Min Yang, Xiaolin Wang, and Yinxian Zhang "Microdisplacement positioning system for a diffraction grating ruling engine", Proc. SPIE 1533, Optomechanics and Dimensional Stability, (1 December 1991); https://doi.org/10.1117/12.48854

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available