Grating line shape characterization using scatterometry

Kenneth P. Bishop; Susan M. Gaspar; Lisa-Michelle Milner; S. Sohail H. Naqvi; John Robert McNeil

doi:10.1117/12.49402

1 October 1991 Grating line shape characterization using scatterometry

Kenneth P. Bishop, Susan M. Gaspar, Lisa-Michelle Milner, S. Sohail H. Naqvi, John Robert McNeil

Proceedings Volume 1545, International Conference on the Application and Theory of Periodic Structures; (1991) https://doi.org/10.1117/12.49402
Event: San Diego, '91, 1991, San Diego, CA, United States

Abstract

Identification of dimensional parameters of an arbitrarily shaped grating using scatter characteristics is presented. A rigorous diffraction model is used to predict the scatter from a known grating structure, and utilizing this information we perform the inverse problem of predicting line shape from a measurement of the scatter.

Citation Download Citation

Kenneth P. Bishop, Susan M. Gaspar, Lisa-Michelle Milner, S. Sohail H. Naqvi, and John Robert McNeil "Grating line shape characterization using scatterometry", Proc. SPIE 1545, International Conference on the Application and Theory of Periodic Structures, (1 October 1991); https://doi.org/10.1117/12.49402

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