Paper
1 December 1991 Gas puff Z-pinch x-ray source: a new approach
Amnon Fisher
Author Affiliations +
Abstract
Gas puff Z-pinches have been operated successfully with peak currents of 100 kA to more than 10 MA. Very little effort has been developed to study long life rep-rated systems. The scaling laws of the gas puff Z-pinch show that up to a few MA (peak pinch current), the neon k-line yield is proportional to I4. In these machines the peak current is proportional to the square root of the energy stored in the system. As a result the x-ray yield is proportional to the square of the stored energy. A 1 pulse/sec with about one Megampere current can be realized with a capacitor-driven gas puff Z-pinch storing 20 to 40 kJ. Such a system will deliver about one kW Ne k line radiation (about 10 A) and a few hundred Watts Kr 1 line radiation. At this power level this machine becomes very attractive for x-ray applications such as x-ray lithography, x-ray microscopy, and spectroscopy. Reliability, components life time, debris, and state of the art are discussed.
© (1991) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Amnon Fisher "Gas puff Z-pinch x-ray source: a new approach", Proc. SPIE 1552, Short-Wavelength Radiation Sources, (1 December 1991); https://doi.org/10.1117/12.50609
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
X-rays

Neon

X-ray sources

X-ray lithography

X-ray microscopy

Capacitors

Krypton

Back to Top