Raman scattering as an in-situ optical diagnostic

Irving P. Herman

doi:10.1117/12.56643

1 January 1992 Raman scattering as an in-situ optical diagnostic

Irving P. Herman

Proceedings Volume 1594, Process Module Metrology, Control and Clustering; (1992) https://doi.org/10.1117/12.56643
Event: Microelectronic Processing Integration, 1991, San Jose, CA, United States

Abstract

Raman microprobe scattering is shown to be a useful non-invasive real-time probe during thin film processing. Applications during laser-assisted processing that are relevant to microelectronics are emphasized.

Citation Download Citation

Irving P. Herman "Raman scattering as an in-situ optical diagnostic", Proc. SPIE 1594, Process Module Metrology, Control and Clustering, (1 January 1992); https://doi.org/10.1117/12.56643

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