Light scattering of highest damage resistant fluoride HR coating for KrF laser

Takao Izawa; R. Uchimura; N. Yamamura; T. Yakuoh; Yoshiro Owadano; Yuji Matsumoto; M. Yano

doi:10.1117/12.60132

29 July 1992 Light scattering of highest damage resistant fluoride HR coating for KrF laser

Takao Izawa, R. Uchimura, N. Yamamura, T. Yakuoh, Yoshiro Owadano, Yuji Matsumoto, M. Yano

Proceedings Volume 1624, Laser-Induced Damage in Optical Materials: 1991; (1992) https://doi.org/10.1117/12.60132
Event: Laser-Induced Damage in Optical Materials: 1991, 1991, Boulder, CO, United States

Abstract

Fluoride HR coatings consisting of middle and low refractive index fluorides often show a higher damage threshold than oxide coatings in the UV range. However, the light scattering level of fluoride HR coatings tend to be higher than oxide ones. In this study, the scattering and surface roughness of fluoride HR coatings for KrF laser were investigated, and also compared with those of oxide HR coatings using Al₂O₃ as high index materials.

Citation Download Citation

Takao Izawa, R. Uchimura, N. Yamamura, T. Yakuoh, Yoshiro Owadano, Yuji Matsumoto, and M. Yano "Light scattering of highest damage resistant fluoride HR coating for KrF laser", Proc. SPIE 1624, Laser-Induced Damage in Optical Materials: 1991, (29 July 1992); https://doi.org/10.1117/12.60132

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