Development of new instrument detecting integrated intensity fluctuations for surface roughness measurements

Eiichi Miyazaki; Kunifumi Nakanishi; Takeaki Yoshimura

doi:10.1117/12.132113

20 October 1992 Development of new instrument detecting integrated intensity fluctuations for surface roughness measurements

Eiichi Miyazaki, Kunifumi Nakanishi, Takeaki Yoshimura

Author Affiliations +

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132113
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

A new method to measure the surface roughness under a fully developed speckle pattern illumination has been proposed. This technique is used on the basis that the roughness depends on the speckle size of doubly scattered light and the size can be determined from the spatial fluctuations of the integrated intensity over a finite area. Using the CCD camera as a photodetector, the proposed system can determine the roughness at on-line.

Citation Download Citation

Eiichi Miyazaki, Kunifumi Nakanishi, and Takeaki Yoshimura "Development of new instrument detecting integrated intensity fluctuations for surface roughness measurements", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132113

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