Measurement of radius of concave mirror by zone-plate interferometer

Zhi Qiang Liu; Katsuyuki Okada; Jumpei Tsujiuchi

doi:10.1117/12.132153

20 October 1992 Measurement of radius of concave mirror by zone-plate interferometer

Zhi Qiang Liu, Katsuyuki Okada, Jumpei Tsujiuchi

Proceedings Volume 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation; (1992) https://doi.org/10.1117/12.132153
Event: International Symposium on Optical Fabrication, Testing, and Surface Evaluation, 1992, Tokyo, Japan

Abstract

Interferometers always measure the relative phase distribution of a sample to a reference subject, and absolute measurement of the sample is difficult unless the exact shape of the reference phase distribution is known. A method of differential interferometer, in which the differences of two interferograms obtained before and after the slight change of parameters in the optical configuration is measured, can be used to measure the shape of the sample without the exact knowledge of the reference phase distribution. This method is applied for measuring the radius of curvature of a Newton gauge.

Citation Download Citation

Zhi Qiang Liu, Katsuyuki Okada, and Jumpei Tsujiuchi "Measurement of radius of concave mirror by zone-plate interferometer", Proc. SPIE 1720, Intl Symp on Optical Fabrication, Testing, and Surface Evaluation, (20 October 1992); https://doi.org/10.1117/12.132153

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